Nanomotion
Offering Cutting-Edge Motion solutions

Founded in 1992, Nanomotion develops motors and motion solutions based on its proprietary ultrasonic standing wave piezoelectric technology. These solutions are suitable for a wide range of applications, including optronics, semiconductor, and metrology.

Nanomotion’s compact and miniature motors offer accurate and precise movement, high resolution, and low settling time, as well as a dynamic range of velocity and force. In normal servo mode, they function like DC motors; in an “actuator mode” it functions as a high resolution piezo actuator. As a result, the Nanomotion solutions can ensure high speed and high resolution in small package as one drive axis, rather than other types of motion technologies that combine separate coarse and fine positioning. For example, the Nanomotion motors can drive systems up to 500 millimeters per second as well as achieve 1nm positioning.

“Unlike a permanent magnet motor, with velocity ripple and higher power consumption, the piezoelectric motors ensure speed and resolution, at the same time,” says Alan Feinstein, President, Nanomotion.

With its cutting-edge motors and motion solutions, Nanomotion has served a plethora of clients over the years. For example, one of its customers needed a specific motion system form factor, with the ability to position it in a 1nm environment both under temperature control as well as with an exceptionally clean stage. The client’s previous vendor was not able to address all these requirements. This drove them to partner with Nanomotion.

Working in liaison with the client, Nanomotion designed a specific three-axis system moving in X, Y, and Z. The company also incorporated the client’s controller of choice, enabling them to follow their existing way of operation.

“We were able to integrate the controller into a cabinet and utilize one of the newer motors that we had deployed specifically to function over long travel distances and high speed up to 500mm/sec,” says Feinstein.

Nanomotion has developed a wide range of motion modules and precision stages that are able to meet the stringent requirements of space applications. These modules and stages, along with the controls, can survive the shock/vibration of launch, withstand the radiation levels exposed to LEO satellites, and function for years with a wide operating temperature range. For instance, Nanomotion has built a three-axis assembly for LEO satellites. Already, one client is leveraging deployed units that are providing 150 million cycles over three years.

“Our solutions are recognized for higher performance, higher reliability, and greater durability,” says Feinstein.

What enables Nanomotion to achieve such a feat is its team of experts, who hold decades of experience in motion solutions and their applications. They leverage this knowledge to optimize motor and system performance. More importantly, Nanomotion solutions are designed around specific customer requirements—be it ultraclean motion systems or placing the motor in 1nm environment.

For the past three decades, Nanomotion has been redefining the world of motion systems with a focus on continuous innovation. The company’s non-magnetic and vacuum compatible motors are playing a crucial role in the modern-day semiconductor processes that utilize either an electron beam or an ion beam. Nanomotion’s unique products and capabilities are closing the gaps in meeting the next generation of semiconductor performance requirements.